Simco-ION AeroBar 5635M MP Ionizing Bar
The Simco-ION Model 5635M AeroBar MP ionizing bar is specifically designed to eliminate static charge. Specifically, it targets semiconductor and other ultra-clean manufacturing processes. These processes require fast discharge time, low swing voltages, and precision balance, but do not permit exposed metallic surfaces. Furthermore, the Model 5635M utilizes MP technology. This technology combines a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery.
Consequently, this breakthrough technology enables users to mount the AeroBar within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness. Ultimately, this level of cleanliness is critical for smaller technology nodes.
Specifications
| Input Voltage | 24 VDC ±10% |
|---|---|
| Balance | Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24” distance) |
| Ion Emission | Modulated pulse (MP) technology |
| Emitter Points | Single-crystal silicon emitter points |
| Cleanliness | Meets ISO 14644-12 (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) using 45-50% |
| Enclosure | ABS chassis (ground plate – carbon filled ABS) |
| Dimension | 3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in.
(78H x 34W x 450/600/850/1000/1150/1300/1450/1600/1750/ 1900/2050/2200/2350L mm) |
