Simco-ION AeroBar 5225 Critical Environment Ionizing System
The Simco-ION Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. Specifically, it offers high ion output. Consequently, this provides fast neutralization of electric charge on wafers. Therefore, the system achieves E78 compliance at the most stringent levels.
Specifications
| AeroBar 5225 | |
|---|---|
| Input Voltage | 24 VAC, 50/60 Hz, 1W (typ), received from the Interface Module |
| Ion Emission | Pulsed DC, Steady-state DC or standby |
| Emitter Points | Single-crystal Silicon, replaceable |
| Cleanliness | ISO 14644-1 Class 1 |
| Dimension | 2.1H x 1.2W x 22.4, 28.4, 35.7, 44.4, 55.6, 64.4, 75.5, or 84.4L in.
(5.3H x 3.1W x 56.9, 72.1, 90.7, 112.8, 141.2, 163.6, 191.8, or 214.4 L cm) |
| Weight | 1.5 lb (1.02 kg) for a 22 in (56.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30 cm) |
